Status: ✔ MET5 (COMMISSIONING: 2-3 wafers per shift) ✘ MET ✔ DCT ✔ DCT 10 mm x 10 mm

Welcome to

This website is a portal for managing all communication and information related to your EUREKA shifts at Berkeley Lab. You will use this site to:

  • submit experimental plans
  • submit package information (tracking and contents)
  • discuss, comment, or provide special instructions for your shifts
  • find documentation on our EUV exposure systems, reticles, and wafer processing equipment.

The documentation and website video tour will help you get started.

EUV Patterning Capabilities

A note from Patrick

Our goal is to make your visit and experiment the best it can be.​ ​Our experienced ​staff of scientists, engineers, and technicians​ are here to help you through ​the whole​ ​process, including logistics, experiment design, data analysis, and more. We look forward to working with you.

Patrick Naulleau,
MET Principal Investigator